Materials Fundamentals of Gate Dielectrics

Materials Fundamentals of Gate Dielectrics

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One of the key aspects of CMOS technology is the metala€“oxidea€“ semiconductor ( MOS) capacitor that acts as the control element in a CMOS device. While there are ... An energy band diagram for this structure is shown in Fig. 1. When a bias is anbsp;...

Title:Materials Fundamentals of Gate Dielectrics
Author: Alexander A. Demkov, Alexandra Navrotsky
Publisher:Springer Science & Business Media - 2006-05-24

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